Award Type [Axis] SIGNIFICANT ACCOUNTING POLICIES [Abstract] Accounts payable OTHER PAYABLE AND ACCRUED EXPENSES Accounts Payable and Accrued Liabilities Disclosure [Text Block] Accounts payable Accounts Payable, Related Parties, Current Accounts Receivable [Member] Accounts receivable Accounts Receivable, before Allowance for Credit Loss, Current Accounts receivable, less allowance for doubtful accounts of $0 as of June 30, 2020 and December 31, 2019 (note 3) Total Accounts Receivable [Abstract] Accounts Receivable, after Allowance for Credit Loss, Current [Abstract] Accrued commissions Accrued professional fees Income taxes payable Less: Total accumulated depreciation Accumulated Depreciation, Depletion and Amortization, Property, Plant, and Equipment Accumulated Other Comprehensive Loss [Member] AOCI Attributable to Parent [Member] Accumulated other comprehensive loss Additional Paid-In Capital [Member] Additional paid in capital Additional Paid in Capital Stock-based compensation APIC, Share-based Payment Arrangement, Increase for Cost Recognition Adjustments to reconcile net income from operations to net cash used in operating activities: Stock-based compensation expense Stock-based compensation expense Accounts receivable, allowance for doubtful accounts Less: allowance for doubtful accounts Assets Assets Assets [Abstract] Total assets Assets Total current assets Assets, Current Current assets: Current assets: Balance Sheet Location [Domain] Balance Sheet Location [Axis] DESCRIPTION OF BUSINESS Business Description and Basis of Presentation [Text Block] Cash and cash equivalents Net increase (decrease) in cash, cash equivalents and restricted cash Cash, Cash Equivalents, Restricted Cash and Restricted Cash Equivalents, Period Increase (Decrease), Including Exchange Rate Effect Cash paid for amounts included in the measurement of lease liabilities [Abstract] Cash Flow, Operating Activities, Lessee [Abstract] Cash, cash equivalents and restricted cash at end of period Cash, cash equivalents and restricted cash at beginning of period Cash, Cash Equivalents, Restricted Cash and Restricted Cash Equivalents Class of Stock [Line Items] Class of Stock [Line Items] Class of Stock [Domain] Class of Stock [Domain] Class of Stock [Abstract] Commitments and contingencies (note 17) COMMITMENTS AND CONTINGENCIES Commitments and Contingencies Disclosure [Text Block] COMMITMENTS AND CONTINGENCIES [Abstract] Class B Common Stock [Member] Common Stock Class B [Member] Common Class B [Member] Common Stock [Member] Common Stock [Member] Common Stock [Member] Class A Common Stock [Member] Common Stock Class A [Member] Common Class A [Member] Common stock, par value (in dollars per share) Common stock, par value (in dollars per share) Common Stock, Par or Stated Value Per Share Common stock, shares issued (in shares) Common stock, shares issued (in shares) Common Stock, Shares, Issued Common stock, shares authorized (in shares) Common stock, shares authorized (in shares) Common Stock, Shares Authorized Common stock, shares outstanding (in shares) Common stock, shares outstanding (in shares) Common stock Common Stock, Value, Issued Income Tax Expense [Abstract] Comprehensive income (loss) attributable to ACM Research, Inc. Comprehensive Income (Loss), Net of Tax, Attributable to Parent Comprehensive Income Comprehensive Income (Loss), Net of Tax, Including Portion Attributable to Noncontrolling Interest Comprehensive income: Concentration Risk Benchmark [Axis] Concentration Risk Benchmark [Domain] Concentration Risk [Line Items] Concentration Risk [Table] Concentration of credit risk Concentration of Credit Risk Concentration Risk, Credit Risk, Policy [Policy Text Block] Consolidation, Less than Wholly Owned Subsidiary, Parent Ownership Interest, Effects of Changes, Net [Table] Consolidation, Less than Wholly Owned Subsidiary, Parent Ownership Interest, Effects of Changes, Net [Table] Consolidation, Less than Wholly Owned Subsidiary, Parent Ownership Interest, Effects of Changes, Net [Line Items] Consolidation, Less than Wholly Owned Subsidiary, Parent Ownership Interest, Effects of Changes, Net [Line Items] Construction in progress Advances from customers Contract with Customer, Liability, Current Convertible shares in to Class A common stock (in shares) Cost of revenue Cost of Revenue [Member] Cost of Sales [Member] SHORT-TERM BORROWINGS [Abstract] Promissory note principal amount Debt Instrument, Face Amount Schedule of Long-term Debt Instruments [Table] Schedule of Long-term Debt Instruments [Table] Debt Instrument [Axis] Debt Instrument [Axis] Debt Instrument [Axis] Debt Instrument [Line Items] Debt Instrument [Line Items] Debt Instrument, Name [Domain] Debt Instrument, Name [Domain] Debt Instrument, Name [Domain] Interest rate on promissory note Debt Instrument, Interest Rate, Stated Percentage Line of credit due date Promissory note maturity date Debt Instrument, Maturity Date Deferred revenue Deferred tax assets (note 16) Deferred income taxes Depreciation and amortization Depreciation expense STOCK-BASED COMPENSATION [Abstract] STOCK-BASED COMPENSATION Share-based Payment Arrangement [Text Block] Investment due amount Net income (loss) attributable to ACM Research, Inc. per common share (note 2): Net income (loss) per common share: Earnings Per Share, Basic and Diluted [Abstract] Basic (in dollars per share) Basic (in dollars per share) Earnings Per Share, Basic Basic and Diluted Net Income per Common Share Earnings Per Share, Policy [Policy Text Block] Basic and Diluted Net Income per Common Share [Abstract] Earnings Per Share [Abstract] Diluted (in dollars per share) Diluted (in dollars per share) Earnings Per Share, Diluted Effect of exchange rate changes on cash, cash equivalents and restricted cash Statutory U.S federal income tax rate Foreign corporate tax rate Unrecognized employee stock-based compensation expense Share-based Payment Arrangement, Nonvested Award, Cost Not yet Recognized, Amount Share-based Payment Arrangement, Expensed and Capitalized, Amount [Line Items] Weighted-average period over which unrecognized compensation is expected to be recognized Accrued payroll Employee Share Option [Member] Employee Stock Purchase Plan [Member] Share-based Payment Arrangement, Option [Member] Manufacturing Equipment [Member] Equipment [Member] Equity Component [Domain] Equity Component [Domain] COMMON STOCK [Abstract] Purchase price Percentage of ordinary shares issued Investment - equity method Financial liability carried at fair value Financial liability carried at fair value (note 11) Intangible assets, net Finite-Lived Intangible Assets, Net China [Member] Foreign Tax Authority [Member] Loss on disposals of property, plant and equipment Gain (Loss) on Disposition of Property Plant Equipment General and administrative General and Administrative Expense [Member] Gross profit Gross Profit Income Tax Authority [Axis] Income before income taxes Income (Loss) from Continuing Operations before Income Taxes, Noncontrolling Interest Income Statement Location [Axis] INCOME TAXES [Abstract] Income Statement Location [Domain] Equity income in net income of affiliates Equity income in net income of affiliates Income (Loss) from Equity Method Investments Condensed Consolidated Statements of Operations and Comprehensive Income (Unaudited) [Abstract] Interest or penalties Income Tax Examination, Penalties and Interest Expense INCOME TAXES Income Tax Disclosure [Text Block] Income Tax Authority [Domain] Income Taxes [Abstract] Income Tax Expense (Benefit), Continuing Operations [Abstract] Income tax expense (note 16) Total income tax expense Total income tax expense Cash paid for income taxes Other long-term liabilities Increase (Decrease) in Other Noncurrent Liabilities Other long-term assets Increase (Decrease) in Other Noncurrent Assets Advances from customers Accounts payable Increase (Decrease) in Accounts Payable Income tax payable Accounts receivable Increase (Decrease) in Accounts Receivable Deferred revenue Increase (Decrease) in Deferred Revenue Other payables and accrued expenses Net changes in operating assets and liabilities: Other receivables Increase (Decrease) in Other Receivables Inventory Increase (Decrease) in Inventories Prepaid expenses Increase (Decrease) in Prepaid Expense Increase (Decrease) in Stockholders' Equity [Roll Forward] Increase (Decrease) in Stockholders' Equity [Roll Forward] Interest expense Interest Expense Interest expense related to short-term borrowings Interest Expense, Short-term Borrowings Interest paid Finished goods INVENTORIES [Abstract] INVENTORIES Inventory Disclosure [Text Block] Raw materials Inventories (note 4) Work in process Total inventory Inventory, Gross Inventory [Abstract] Interest income Long-term investments (note 10) Total Investments [Abstract] Investor [Member] 2023 Lessee, Operating Lease, Liability, to be Paid, Year Three Less: interest Lessee, Operating Lease, Liability, Undiscounted Excess Amount 2020 2024 Lessee, Operating Lease, Liability, to be Paid, Year Four Weighted average remaining lease terms and discount rates [Abstract] Total lease payments Lessee, Operating Lease, Liability, to be Paid Maturities of Lease Liabilities for Operating Leases Lessee, Operating Lease, Liability, Maturity [Table Text Block] LEASES Lessee, Operating Leases [Text Block] 2022 Lessee, Operating Lease, Liability, to be Paid, Year Two 2021 Lessee, Operating Lease, Liability, to be Paid, Year One Long-term Debt, Type [Axis] Long-term Debt, Type [Axis] Long-term Debt, Type [Domain] Long-term Debt, Type [Domain] Components of lease expense [Abstract] Lease, Cost [Abstract] Lease cost Lease, Cost Components of Lease Expense Lease, Cost [Table Text Block] Leasehold Improvement [Member] LEASES [Abstract] Total liabilities, redeemable non-controlling interests, and stockholders' equity Liabilities and Equity Liabilities and Stockholders' Equity Total liabilities Liabilities Total current liabilities Liabilities, Current Current liabilities: Maximum borrowing capacity Annual interest rate ACCOUNTS RECEIVABLE Loans, Notes, Trade and Other Receivables Disclosure [Text Block] Accounts receivable pledged as collateral for borrowings LONG-TERM INVESTMENT [Abstract] Required liquidate damage value Non-controlling interests Net income attributable to redeemable non-controlling interests Net Income (Loss) Attributable to Redeemable Noncontrolling Interest Numerator [Abstract] Net Income (Loss) Attributable to Parent [Abstract] Net cash used in operating activities Net Cash Provided by (Used in) Operating Activities Net income (loss) Net Income (Loss) Attributable to Parent Cash flows from investing activities: Net Cash Provided by (Used in) Investing Activities [Abstract] Cash flows from operating activities: Net Cash Provided by (Used in) Operating Activities [Abstract] Net cash used in investing activities Net Cash Provided by (Used in) Investing Activities Net income (loss) available to common stockholders, basic and diluted Net Income (Loss) Available to Common Stockholders, Basic Net cash provided by financing activities Net Cash Provided by (Used in) Financing Activities Cash flows from financing activities: Net Cash Provided by (Used in) Financing Activities [Abstract] Net income attributable to non-controlling interests and redeemable non-controlling interests Less: Net income attributable to non-controlling interests and redeemable non-controlling interests Recent Accounting Pronouncements Non-cash financing activities: Noncash Investing and Financing Items [Abstract] Noncontrolling Interest [Member] Office Equipment [Member] Operating cash outflow from operating leases Maturities of lease liabilities [Abstract] Lessee, Operating Lease, Liability, Payment, Due [Abstract] Weighted average discount rate Present value of lease liabilities Long-term operating lease liability (note 8) Current portion of operating lease liability (note 8) Total operating expenses, net Operating Expenses Operating lease cost Operating lease right-of-use assets, net (note 8) Operating expenses: Weighted average remaining lease term Income from operations Operating Income (Loss) DESCRIPTION OF BUSINESS [Abstract] Other Long-Term Liabilities Other Noncurrent Liabilities [Table Text Block] Open capital commitments Foreign currency translation adjustment OTHER LONG-TERM LIABILITIES [Abstract] Other receivables Other long-term assets Other payables and accrued expenses (note 7) Total Other Long-term Liabilities [Abstract] Other Liabilities, Noncurrent [Abstract] OTHER LONG-TERM LIABILITIES Other long-term liabilities (note 9) Other long-term liabilities Other income, net Others Foreign currency translation adjustment Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax, Portion Attributable to Parent Effect of foreign currency translation gain attributable to redeemable non-controlling interests Other Comprehensive Income (Loss), Foreign Currency Translation Adjustment, Tax, Portion Attributable to Noncontrolling Interest OTHER PAYABLE AND ACCRUED EXPENSES [Abstract] Repayment of investment in cash Payments for (Proceeds from) Investments Purchase of long-term investments Payments to Acquire Long-term Investments Purchase of intangible assets Payments to Acquire Intangible Assets Aggregate price Purchase of property and equipment Payments to Acquire Property, Plant, and Equipment Investments in unconsolidated affiliates Payments to Acquire Interest in Subsidiaries and Affiliates Plan Name [Axis] Plan Name [Domain] Prepaid expenses Total proceeds Proceeds from sale of interest in subsidiary Legal proceedings Proceeds from short-term borrowings Proceeds from stock option exercise to common stock Accrued warranty Net income Net income Property, Plant and Equipment [Line Items] Property, Plant and Equipment [Line Items] PROPERTY, PLANT AND EQUIPMENT, NET Property, Plant and Equipment Disclosure [Text Block] Long-Lived Tangible Asset [Axis] Property, Plant and Equipment Property, Plant and Equipment [Table Text Block] PROPERTY, PLANT AND EQUIPMENT, NET [Abstract] Long-Lived Tangible Asset [Domain] Total cost Property, plant and 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of short-term borrowings Repayments of Lines of Credit Repayments of notes payable Repayments of Notes Payable Research and development Research and Development Expense [Member] Restricted cash Restricted cash Accumulated surplus Retained Earnings (Accumulated Deficit) Accumulated Deficit [Member] Revenue Revenue from Contract with Customer, Excluding Assessed Tax Weighted Average Grant Date Fair Value [Abstract] Share-based Compensation Arrangement by Share-based Payment Award, Options, Nonvested, Weighted Average Grant Date Fair Value [Abstract] Forfeited/cancelled (in dollars per share) Share-based Compensation Arrangement by Share-based Payment Award, Options, Nonvested Options Forfeited, Weighted Average Grant Date Fair Value Expected term in years Outstanding at beginning of period (in dollars per share) Outstanding at end of period (in dollars per share) Share-based Compensation Arrangement by Share-based Payment Award, Option, Nonvested, Weighted Average Exercise Price Outstanding weighed average remaining contractual term Purchase price (in dollars per share) Warrant to purchase shares of Class A common stock (in shares) Sale of Stock, Number of Shares Issued in Transaction Revenue Benchmark [Member] Inventory Schedule of Inventory, Current [Table Text Block] Assumptions Used to Determine Fair Value of Share Options Granted Related Party Balances and Transactions Schedule of Related Party Transactions [Table Text Block] Summary of Share Option Activities Share-based Payment Arrangement, Option, Activity [Table Text Block] Other Payable and Accrued Expenses Schedule of Accounts Payable and Accrued Liabilities [Table Text Block] Income Tax Expense Schedule of Components of Income Tax Expense (Benefit) [Table Text Block] Components of Stock-based Compensation Expense Share-based Payment Arrangement, Cost by Plan [Table Text Block] Basic and Diluted Net Income per Common Share Schedule of Earnings Per Share, Basic and Diluted [Table Text Block] Share-based Payment Arrangement, Expensed and Capitalized, Amount [Table] Property, Plant and Equipment [Table] Property, Plant and Equipment [Table] Schedule of Related Party Transactions, by Related Party [Table] Schedule of Related Party Transactions, by Related Party [Table] Schedule of Share-based Compensation Arrangements by Share-based Payment Award [Table] Schedule of Share-based Compensation Arrangements by Share-based Payment Award [Table] Short-Term Borrowings Schedule of Short-term Debt [Table Text Block] Schedule of Short-term Debt [Table] Schedule of Short-term Debt [Table] Schedule of Stock by Class [Table] Schedule of Stock by Class [Table] Accounts Receivable Sales and Marketing Expense [Member] Selling and Marketing Expense [Member] Sales and marketing Selling and Marketing Expense Senior Secured Promissory Note [Member] Senior Notes [Member] Exercised (in dollars per share) Share-based Compensation Arrangements by Share-based Payment Award, Options, Exercises in 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Share-based Compensation Arrangement by Share-based Payment Award [Line Items] Forfeited/cancelled (in dollars per share) Share-based Compensation Arrangements by Share-based Payment Award, Options, Forfeitures in Period, Weighted Average Exercise Price Stock-Based Compensation [Abstract] Share-based Compensation Arrangement by Share-based Payment Award, Additional General Disclosures [Abstract] Expected dividend Volatility Fair Value of Options Granted [Abstract] Granted (in dollars per share) Share-based Compensation Arrangement by Share-based Payment Award, Options, Grants in Period, Weighted Average Grant Date Fair Value Vested and exercisable (in shares) Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Number Expired (in shares) Share-based Compensation Arrangement by Share-based Payment Award, Options, Expirations in Period Risk-free interest rate Forfeited/cancelled (in shares) Share-based Compensation Arrangement by Share-based Payment 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Class A common shares Number of shares repurchased/surrender in exchange (in shares) Stock repurchase (in shares) Share cancellation (note 11) (shares) Share cancellation (note 11) Share cancellation (note 11) Stock Repurchased During Period, Value COMMON STOCK Stockholders' Equity Note Disclosure [Text Block] Total stockholders' equity Beginning balance Ending balance Stockholders' Equity, Including Portion Attributable to Noncontrolling Interest Total ACM Research, Inc. stockholders' equity Stockholders' Equity Attributable to Parent Stockholders' equity: Stockholders' equity: Subsequent Event Type [Axis] SUBSEQUENT EVENT Subsequent Event [Line Items] Subsequent Event Type [Domain] Subsequent Event [Member] SUBSEQUENT EVENT [Abstract] Subsequent Event [Table] Supplemental disclosure of cash flow information: Transportation Equipment [Member] Unrecognized tax benefits Use of Estimates Effect of dilutive securities (in shares) Weighted Average Number Diluted Shares Outstanding Adjustment Basic (in shares) Weighted average shares outstanding, basic (in shares) Weighted Average Number of Shares Outstanding, Basic Diluted (in shares) Weighted average shares outstanding, diluted (in shares) Weighted average common shares outstanding used in computing per share amounts (note 2): Consolidated Entities [Domain] Consolidated Entities [Domain] Consolidated Entities [Domain] Consolidated Entities [Axis] Consolidated Entities [Axis] Consolidated Entities [Axis] Maximum [Member] Minimum [Member] Statistical Measurement [Axis] Statistical Measurement [Axis] Statistical Measurement [Domain] Statistical Measurement [Domain] Subsidiaries [Member] Subsidiaries [Member] Subsidiaries [Member] Cover page. Entity Address, Address Line One Entity Address, Address Line Two Entity Address, Address Line Three Amendment Flag City Area Code Entity Address, City or Town Entity Address, Country Current Fiscal Year End Date Document Period End Date Entity Incorporation, State or Country Code Entity Listings [Table] Local Phone Number Entity Address, Postal Zip Code Entity Address, State or Province Title of 12(b) Security No Trading Symbol Flag Trading Symbol Security Exchange Name Entity Listings [Line Items] Entity Current Reporting Status Entity Filer Category Entity Registrant Name Entity Central Index Key Entity Tax Identification Number Entity Common Stock, Shares Outstanding Document Fiscal Year Focus Document Fiscal Period Focus Document Type Document Quarterly Report Document Transition Report Entity Interactive Data Current Entity File Number Entity Shell Company Entity Emerging Growth Company Entity Ex Transition Period Entity Small Business Conversion of warrants to common stock. Warrant conversion to common stock Warrant conversion to common stock Refers to the amount of recognized change of the fair value in financial liability. Change in fair value of financial liability Change in fair value of financial liability Amount of cash outflow for the purchase of the right-to-use land and property. Pre-payment for land-use-right and property Prepayment for land-use-right and property Tabular disclosure of lessee's operating lease supplemental cash flow information. Lessee Operating Lease Supplemental Cash Flow Information Related to Operating Leas [Table Text Block] Supplemental Cash Flow Information Related to Operating Leases Tabular disclosure of weighted average remaining lease terms and discount rates for operating leases. Lessee, Operating Lease, Weighted Average Remaining Lease Term and Discount Rate [Table Text Block] Weighted Average Remaining Lease Terms and Discount Rates for Operating Leases Supplemental Cash Flow Information Related to Operating Leases [Abstract] Supplemental cash flow information related to operating leases [Abstract] The entire disclosure for long-term investment. long-term investment [Text Block] LONG-TERM INVESTMENT A container table for all schedule of long-term investment. Long-Term Investment [Table] Long-Term Investment [Table] Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table. Long-Term Investment [Line Items] Long-Term Investment [Line Items] The percentage ownership in Partnership's total subscribed capital. Ownership Percentage in Partnership Ownership percentage in partnership Classification of Investments [Abstract] Classification of Investments [Abstract] The number of investors with agreements entered pursuant to qualifying for the Listing and IPO. Number of Investors with Agreements Entered Number of investors with agreements entered The amount of investment in partnership. Investment in Partnership Investment in partnership Total fund of the Partnership which was contributed by limited partners. Capital Fund of Limited Partnership Total capital fund of limited partnership Acquired an aggregate value Name of the companies a Chinese limited partnership. Semiconductor Manufacturing International Corporation [Member] SMIC [Member] Name of the companies a Chinese limited partnership. Qingdao Fortune-Tech Xinxing Capital Partnership [Member] Qingdao LP [Member] Name of the companies components suppliers. Shengyi Semiconductor Technology Company Limited [Member] Shengyi [Member] Name of the companies a Chinese limited partnership. Hefei Shixi Chanheng Integrated Circuit Industry Venture Capital Fund Partnership [Member] Hefei Shixi [Member] Name of the companies principal material supplier. Ninebell Company Limited [Member] Ninebell [Member] Represents Second portion of investors. Second Tranche Investors [Member] Business Description [Abstract] Description of Business [Abstract] Percentage of equity interests acquired at the acquisition date in the business combination. Business Acquisition, Percentage of Equity Interests Acquired Purchase of equity interest percentage The percentage of ownership of common stock or equity participation of subsidiaries. Subsidiaries Ownership Percentage Effective interest held as at Name of entity owned or controlled by another entity. Name of Subsidiary Name of subsidiaries Term to complete listing of shares of ACM Shanghai on the Shanghai Stock Exchange's new Sci-Tech innovation board known as Star Market. Term to complete listing of shares Entity owned or controlled by another entity. Shengwei Research (Shanghai), Inc. [Member] Shengwei Research (Shanghai), Inc. [Member] Shangwei Research (Shanghai), Inc. [Member] Entity owned or controlled by another entity. ACM Research Korea CO., LTD [Member] Entity owned or controlled by another entity. ACM Research (Cayman), Inc. [Member] Entity owned or controlled by another entity. ACM Research (Wuxi), Inc. [Member] Entity owned or controlled by another entity. CleanChip Technologies Limited [Member] CleanChip Technologies Limited [Member] Information of place and date of incorporation of an entity. Name of Date of Incorporation Date and place of Incorporation Represents first portion of investors. First Tranche Investors [Member] Entity owned or controlled by another entity. ACM Research (CA), Inc. [Member] Entity owned or controlled by another entity. ACM Research (Shanghai), Inc. [Member] ACM Research (Shanghai), Inc. [Member] ACM Shanghai [Member] Tabular disclosure of the entity's subsidiaries and information of their direct or indirect interests with date, state of incorporation information. Direct or Indirect Interests in Subsidiaries [Table Text Block] Direct or Indirect Interests of Subsidiaries Tabular disclosure of long-term investment. Long-Term Investment [Table Text Block] Components of Long-Term Investment Disclosure of accounting policy for basis of presentation and principles of consolidation, used to prepare the financial statements. Basis of Presentation and Principles of Consolidation [Policy Text Block] Basis of Presentation and Principles of Consolidation Disclosure of accounting policy for COVID-19 assessment. COVID-19 Assessment [Policy Text Block] COVID-19 Assessment Concentration of Credit Risk [Abstract] Concentration of Credit Risk [Abstract] Number of major customers who contributes 10% or more of entity's total revenue. Number of Major Customers Number of major customers Other items related to other long-term liabilities. Other [Member] Other [Member] Subsidies to polytetrafluoroethylene, commenced in 2018. Subsidies to Polytetrafluoroethylene [Member] Subsidies to Polytetrafluoroethylene, Commenced in 2018 [Member] Subsidies to electro copper plating project, commenced in 2014. Subsidies to Electro Copper Plating project [Member] Subsidies to Electro Copper Plating Project, Commenced in 2014 [Member] Subsidies to Tahoe-Single Bench Clean, commenced in 2020. Subsidies to Tahoe-Single Bench Clean, Commenced in 2020 [Member] Subsidies to Tahoe-Single Bench Clean, Commenced in 2020 [Member] Subsidies to backside clean-YMTC national project, commenced in 2020. Subsidies to Backside Clean YMTC National Project [Member] Subsidies to Backside Clean-YMTC National Project, Commenced in 2020 Subsidies to stress free polishing project, commenced in 2008 and 2017. Subsidies to Stress Free Polishing project [Member] Subsidies to Stress Free Polishing Project, Commenced in 2008 and 2017 [Member] A contractual arrangement with a lender under which borrowings can be made up to a specific amount at any point in time, and under which borrowings outstanding may be either short-term or long-term, depending upon the particulars. Line of Credit 6 [Member] Line of Credit Due on March 25, 2020 [Member] A contractual arrangement with a lender under which borrowings can be made up to a specific amount at any point in time, and under which borrowings outstanding may be either short-term or long-term, depending upon the particulars. Line of Credit 5 [Member] Line of Credit Due on February 14, 2020 [Member] A contractual arrangement with a lender under which borrowings can be made up to a specific amount at any point in time, and under which borrowings outstanding may be either short-term or long-term, depending upon the particulars. Line of Credit 12 [Member] Line of Credit Due on June 27, 2021 [Member] A contractual arrangement with a lender under which borrowings can be made up to a specific amount at any point in time, and under which borrowings outstanding may be either short-term or long-term, depending upon the particulars. Line of Credit 9 [Member] Line of Credit Due on April 1, 2021 [Member] A contractual arrangement with a lender under which borrowings can be made up to a specific amount at any point in time, and under which borrowings outstanding may be either short-term or long-term, depending upon the particulars. Line of Credit 17 [Member] Line of Credit Due on May 28, 2021 [Member] A contractual arrangement with a lender under which borrowings can be made up to a specific amount at any point in time, and under which borrowings outstanding may be either short-term or long-term, depending upon the particulars. Line of Credit 11 [Member] Line of Credit Due on April 29, 2021 [Member] A contractual arrangement with a lender under which borrowings can be made up to a specific amount at any point in time, and under which borrowings outstanding may be either short-term or long-term, depending upon the particulars. Line of Credit 4 [Member] Line of Credit Due on January 22, 2020 [Member] A contractual arrangement with a lender under which borrowings can be made up to a specific amount at any point in time, and under which borrowings outstanding may be either short-term or long-term, depending upon the particulars. Line of Credit 13 [Member] Line of Credit Due on April 12, 2021 [Member] A contractual arrangement with a lender under which borrowings can be made up to a specific amount at any point in time, and under which borrowings outstanding may be either short-term or long-term, depending upon the particulars. Line of Credit 7 [Member] Line of Credit Due on April 17, 2020 [Member] A contractual arrangement with a lender under which borrowings can be made up to a specific amount at any point in time, and under which borrowings outstanding may be either short-term or long-term, depending upon the particulars. Line of Credit 14 [Member] Line of Credit Due on May 24, 2021 [Member] A contractual arrangement with a lender under which borrowings can be made up to a specific amount at any point in time, and under which borrowings outstanding may be either short-term or long-term, depending upon the particulars. Line of Credit 20 [Member] Line of Credit Due on December 17, 2020 [Member] A contractual arrangement with a lender under which borrowings can be made up to a specific amount at any point in time, and under which borrowings outstanding may be either short-term or long-term, depending upon the particulars. Line of Credit 16 [Member] Line of Credit Due on June 27, 2021 [Member] A contractual arrangement with a lender under which borrowings can be made up to a specific amount at any point in time, and under which borrowings outstanding may be either short-term or long-term, depending upon the particulars. Line of Credit 3 [Member] Line of Credit Due on January 18, 2020 [Member] A contractual arrangement with a lender under which borrowings can be made up to a specific amount at any point in time, and under which borrowings outstanding may be either short-term or long-term, depending upon the particulars. Line of Credit 19 [Member] Line of Credit Due on June 16, 2021 [Member] A contractual arrangement with a lender under which borrowings can be made up to a specific amount at any point in time, and under which borrowings outstanding may be either short-term or long-term, depending upon the particulars. Line of Credit 8 [Member] Line of Credit Due on August 24, 2020 [Member] A contractual arrangement with a lender under which borrowings can be made up to a specific amount at any point in time, and under which borrowings outstanding may be either short-term or long-term, depending upon the particulars. Line of Credit 10 [Member] Line of Credit Due on June 27, 2021 [Member] A contractual arrangement with a lender under which borrowings can be made up to a specific amount at any point in time, and under which borrowings outstanding may be either short-term or long-term, depending upon the particulars. Line of Credit 2 [Member] Line of Credit Due on February 21, 2020 [Member] A contractual arrangement with a lender under which borrowings can be made up to a specific amount at any point in time, and under which borrowings outstanding may be either short-term or long-term, depending upon the particulars. Line of Credit 1 [Member] Line of Credit Due on January 23, 2020 [Member] A contractual arrangement with a lender under which borrowings can be made up to a specific amount at any point in time, and under which borrowings outstanding may be either short-term or long-term, depending upon the particulars. Line of Credit 15 [Member] Line of Credit Due on May 27, 2021 [Member] A contractual arrangement with a lender under which borrowings can be made up to a specific amount at any point in time, and under which borrowings outstanding may be either short-term or long-term, depending upon the particulars. Line of Credit 18 [Member] Line of Credit Due on June 7, 2021 [Member] Carrying value as of the balance sheet date of obligations incurred through that date and payable for machine testing fees. Accrued Machine Testing Fees, Current Accrued machine testing fees Value of stock issued as a result of the exercise of stock warrants. Stock Issued During Period, Value, Common Stock Warrant Exercised Exercise of stock warrant Number of share warrants (or share units) exercised during the current period. Stock Issued During Period, Shares, Common Stock Warrant Exercised Exercise of common stock warrant issued (in shares) Exercise of stock warrant (in shares) The amount of reclassification of redeemable noncontrolling interest holders. Reclassification of Redeemable Non Controlling Interest Reclassification of redeemable non-controlling interest Reclassification of redeemable non-controlling interest FINANCIAL LIABILITY CARRIED AT FAIR VALUE [Abstract] The entire disclosure for the financial liability for fair value of financial instruments (as defined), including financial assets and financial liabilities (collectively, as defined), and the measurements of those instruments as well as disclosures related to the fair value of non-financial assets and liabilities. Such disclosures about the financial instruments, assets, and liabilities would include: (1) the fair value of the required items together with their carrying amounts (as appropriate); (2) for items for which it is not practicable to estimate fair value, disclosure would include: (a) information pertinent to estimating fair value (including, carrying amount, effective interest rate, and maturity, and (b) the reasons why it is not practicable to estimate fair value; (3) significant concentrations of credit risk including: (a) information about the activity, region, or economic characteristics identifying a concentration, (b) the maximum amount of loss the entity is exposed to based on the gross fair value of the related item, (c) policy for requiring collateral or other security and information as to accessing such collateral or security, and (d) the nature and brief description of such collateral or security; (4) quantitative information about market risks and how such risks are managed; (5) for items measured on both a recurring and nonrecurring basis information regarding the inputs used to develop the fair value measurement; and (6) for items presented in the financial statement for which fair value measurement is elected: (a) information necessary to understand the reasons for the election, (b) discussion of the effect of fair value changes on earnings, (c) a description of [similar groups] items for which the election is made and the relation thereof to the balance sheet, the aggregate carrying value of items included in the balance sheet that are not eligible for the election; (7) all other required (as defined) and desired information. Financial Liability Carried at Fair Value Disclosures [Text Block] FINANCIAL LIABILITY CARRIED AT FAIR VALUE Amount after tax of increase (decrease) in equity from transactions and other events and circumstances from net income (loss) and other comprehensive income (loss), attributable to noncontrolling interests and redeemable noncontrolling interests. Excludes changes in equity resulting from investments by owners and distributions to owners. Comprehensive Income (Loss) Attributable To Non Controlling Interests and Redeemable Non Controlling Interests Less: Comprehensive income attributable to non-controlling interests and redeemable non-controlling interests Amount of increase (decrease) in financial liability carried at fair value and obligation of for which consideration has been received or is receivable. Increase (Decrease) in Financial Liability Carried at Fair Value Change in fair value of financial liability Change in fair value of financial liability Name of related party. Ninebell Co., Ltd [Member] Ninebell Co., Ltd [Member] Name of related party. Shengyi Semiconductor Technology Co., Ltd [Member] Shengyi Semiconductor Technology Co., Ltd [Member] Amount for prepaid expense to related parties. Related Party Transaction, Prepaid Expense from Related Party Prepaid expenses REDEEMABLE NON-CONTROLLING INTERESTS [Abstract] The entire disclosure for a redeemable non-controlling interests. Redeemable Non-Controlling Interests [Text Block] REDEEMABLE NON-CONTROLLING INTERESTS Share-based payment arrangement of non employee stock option granting right, subject to vesting and other restrictions, to purchase or sell certain number of shares at predetermined price for specified period of time. Share-based Payment Arrangement, Non Employee Stock Option [Member] Non-Employee Stock Option [Member] Non-Employee Stock Purchase Plan [Member] Fair value of option grants in period, valuation model assumptions based on service period. Service Period Based Approach [Member] Service Period Based [Member] Share-based payment arrangement granting right, subject to vesting and other restrictions, to purchase or sell certain number of shares at predetermined price for specified period of time. Employee and Non-employee Stock Option [Member] Fair value of option grants in period, valuation model assumptions based on market condition. Market Based [Member] Weighted average grant-date fair value of non-vested options expired. Share-based Compensation Arrangement by Share-based Payment Award Options Expired in Period Weighted Average Grant Date Fair Value Expired (in dollars per share) Weighted average grant-date fair value of non-vested options exercised. Share-based Compensation Arrangement by Share-based Payment Award Options Exercised in Period Weighted Average Grant Date Fair Value Exercised (in dollars per share) Change in Redeemable Noncontrolling Interests [Abstract] Change in Redeemable Non-controlling Interests [Abstract] Subsequent Event Description [Abstract] Subsequent Event [Abstract] Consideration is accounted for as a financial liability, and the company applies fair value option. Consideration Price in Fair Value Consideration price in fair value Number of agreements relating to outstanding obligations among parent and subsidiaries. Number of Agreements Number of agreement Amount, after allowance, receivable from customers, clients, or other third-parties, and receivables classified as other due within one year or the normal operating cycle, if longer. Other Receivables Current [Member] Other Receivables [Member] Cancellation of outstanding obligation between parent and subsidiary. Cancellation of Outstanding Debt Cancellation of outstanding obligation, amount Cash delivered by related party as of the close of business. Cash Delivered as of Close of Business Payment for investment Investment repayment period after exercise of warrant, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days. Investment Repayment Period Investment repayment period Name of related party. Shengxin (Shanghai) Management Consulting Limited Partnership [Member] SMC [Member] A promissory note between parent organization and subsidiary. Intercompany Note [Member] Intercompany Note [Member] Number of votes entitled for each share of common stock. Voting Rights per Share Number of votes for each share entitled Total number of shares cancelled after taking ownership. Number of Shares Cancelled Number of shares cancelled (in shares) Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table. Income Taxes [Line Items] Income Taxes [Line Items] Effective period for entities certified as "advanced and new technology enterprises" to receive preferential income tax rate. Effective period of preferential income tax rate Effective period of preferential income tax rate The number of subsidiaries liable for PRC corporate income taxes rate. Number of Subsidiaries Number of subsidiaries Disclosure of information about income taxes. Income Taxes [Table] Income Taxes [Table] Area of land acquire to use rights. Rights to Acquire a Land Area Rights to acquire land Percentage cost of aggregate land use right. Aggregate Land Use Right Cost Percentage Percentage of aggregate land use right cost The amount transferred to a third party to serve as a deposit, which typically serves as security against failure by the transferor to perform under terms of an agreement. Commitment of Performance Deposit Performance deposit An area within which goods may be landed, handled, manufactured or reconfigured, and reexported without the intervention of the customs authorities during the period. Pilot Free Trade Zone Period Pilot free trade zone period Refund period of deposit, which typically serves as security against failure by the transferor to perform under terms of an agreement. Commitment of Performance Deposit Refund Period Performance deposit refund period All taxes including value-added taxes, corporate income tax, personal income taxes, urban maintenance and construction taxes, education surcharges, stamp taxes, and vehicle and shipping taxes. Annual Total Taxes Annual total taxes Period after the land use right is obtained. Land Use Rights Period Land use rights period